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Monitoring of Volatile & Semi-Volatile Organic Compound Contamination in Cleanroom Environments

Due to their size (.2~3.0 nm), AMCs can pass through ulta-low particulate air filters. AMC’s are of great concern to any sensitive micro-electronics manufacturing process, especially in nano-technology applications.

Overview

Airborne Molecular Contamination (AMC)

AMC’s refer to contaminants in the air which exist as molecules. According to ISO 14644-8 classification of airborne molecular contamination [1]; “the product or process can be sensitive to, or can be destroyed by, molecular contamination resulting from airborne molecules due to external, process, or otherwise generated sources.”

The presence of Airborne Molecular Contamination (AMC) within sensitive material processing areas has become more significant as device geometries for integrated circuits and disk drives have shrunk. With higher and higher precision processes evolving, ever smaller concentrations of AMC’s have been shown to play a critical role in the quality of product resulting from these fabrication processes.

Due to their size (.2~3.0 nm), AMCs can pass through ulta-low particulate air filters. AMC’s are of great concern to any sensitive micro-electronics manufacturing process, especially in nano-technology applications. Organic contaminants exist from nearly all materials introduced into a cleanroom. The chemical composition of the material, surface area and temperature determine the levels of contamination contributed to the room. AMCs can accumulate onto critical surfaces and change their electrical properties or in the case of optics create a film which can disrupt signaling systems.

Contaminants include Molecular Acids, Molecular Bases, Molecular Condensables, Molecular Dopants, and more specifically;

  • Plasticizer: phthalates, adipate
  • Antioxidants: BHT
  • Fatty Acid Amides
  • Alcohol Amines
  • Fatty Acids
  • Other Organic Acids
  • Amines
  • Esters
  • Sulfates, Sulfonates
  • Triphenyl-phosphate
  • Silicones
  • Aromatic CxHyOz
  • Fluorocarbons